Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology
نویسندگان
چکیده
The fabrication of nanostructures with high resolution and precise control the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process. In case magnetic materials, apart from FEBID potential in standard substrates for multiple applications data storage logic, use this technology growth nanomagnets on different types scanning probes opens new paths sensing, becoming benchmark functionalization. This work reviews recent advances integration onto cantilevers to produce advanced sensing devices unprecedented performance.
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[This corrects the article DOI: 10.3762/bjnano.8.214.].
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ژورنال
عنوان ژورنال: Magnetochemistry
سال: 2021
ISSN: ['2312-7481']
DOI: https://doi.org/10.3390/magnetochemistry7100140